CHEN, Guojin; YANG, Haoyu; YU, Bei; REN, Haoxing. Intelligent OPC Engineer Assistant for Semiconductor Manufacturing. Proceedings of the AAAI Conference on Artificial Intelligence, [S. l.], v. 39, n. 22, p. 23144–23151, 2025. DOI: 10.1609/aaai.v39i22.34479. Disponível em: https://ojs.aaai.org/index.php/AAAI/article/view/34479. Acesso em: 10 may. 2026.